Recrystallisation of preamorphized silicon investigated by RBS and PAC

G. Rohrlack, K. Freitag, R. Vianden, R. Gwilliam, B.-J. Sealy, Z. Jafri

Amorphous Silicon Technology - 1996. Symposium, San Francisco, CA, USA, 8-12 April 1996 * Pittsburgh, PA, USA: Mater. Res. Soc, 1996, p 313-316


Abstract:

The technique of preamorphization is a well-known method to avoid channeling tails of implanted dopants when fabricating devices. This is achieved by implanting a nondopant atom to produce the amorphous layer. We studied the recrystallisation of silicon preamorphized by Si, Ge and Sn implants. The recrystallisation was investigated by RBS and the gamma-gamma perturbed angular correlation (PAC) technique. RBS provides information about the thickness and the perfection of the recovered layer. Additional experimental data are supplied by the PAC technique, which used the postimplanted radioactive isotope 111In as a probe atom. The recovery of the lattice structure in the vicinity of the probe atoms is monitored on a microscopic scale via the electric field gradient produced at the site of the In nucleus by the surrounding lattice defects. The results are discussed and compared to the RBS data.